P/N ATJ-RFE
Providing total solutions for used equipment
AMAT · Lam Research · Tokyo Electron · ASM · and other core fab platforms.
Business capability
What we handle end to end
Process coverage
Where we're strongest
Photo
Stepper / Scanner / Track
Thin film
CVD / PVD / EPI
Etch
Etcher / Asher
Diffusion
RTP / Furnace
Metrology
CD-SEM / Particle Measurement, etc.
Clean / CMP
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Key services
In-house refurbishment & chamber services
Refurbishment & Overhaul
System, chamber, and parts refurbishment
Retrofit & Upgrade
Equipment and process upgrades
Chamber & Part Innovation
Hot Al, TiN, SiP, TiX, MOCVD — and new part designs
Process Consulting
Process and yield consulting
In stock
Key consumables & core parts
How it works
Our process
Customer request
Tool sourcing
Quote & confirm
Refurb
Setup / service